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ITR ATM

2024.07.10

World's First Robot in Semiconductor Glass Substrate Packaging Lines

Industrial Transfer Robot ATM


Are you looking for a robot optimized for next-generation semiconductor processes and glass substrate packaging lines?

The ITR ATM is the world's first robot to be applied in semiconductor glass substrate packaging lines.

With its outstanding technology, it offers flexible customization to meet various customer needs.


The ITR ATM boasts high quality and reliability.

Its excellent path precision allows for reliable wafer transfer, maximizing process efficiency.

It is compatible with various path lines through S/P and cylindrical methods, making it adaptable to a wide range of processes.


With customizable options like Glass Alignment and a built-in ejector, the ITR ATM accurately reflects customer needs.

Lead the future of semiconductor technology with the ITR ATM.


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Smart Factory/Solution > Industrial robot

ITR ATM

ITR ATM

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